Microwave Plasma CVD System

10kW microwave plasma CVD system, microwave power source adopts the modular control, and PLC touch screen panel operation. Its

Technique Data of GMPS-2100CB/ GMPS-2100CC Microwave Plasma CVD System

Operation frequency: 2450±20MHz

Output power: 2KW-10KW continuously adjustable, the maximum power is 10KW.

Power stability: (under the rated power electrical level) ±0.8%,ripple wave is less than ±1% (when the microwave output the rated power).

System match: System VSWR: 1.5

Output waveguide interface: WR430 with FD-22 standard flange.

Control mode: manual program control, computer control.

Input power: 380V±10% three-phase, four-wires

Cooling water flow rate: 8L/min water pressure 4Kg

Computer interface: RS-458-232

Microwave leak: comply with the national standard (less than 1mW).

3.2 Microwave reactor

   The ellipse chamber, dimension: long axis 310mm, short axis 200mm

   The dish chamber, dimension: diameter 400mm, height 300mm

   It has multimode of operation and can stand the power over 12KW.

   It has water-cooled jacket.

   It can electro-discharge stably in the air pressure 3KPa--60KPa (under the necessary precondition that the microwave output power is appropriate.)

3.3 Vacuum system: The ultimate vacuum degree is < 5×10-4 Pa.

3.4 Gas system: four-circuits MFC D07-19CM (50; 200; 500; 2000 SCCM)

3.5 Sample bracket system: the electric control vertical action range: 180mm.

                     Diameter of the baseplate is ≤φ130mm, and the diameter of the substrate is ≤φ110mm.

                     With the baseplate water cooling, and the cooling water flow rate is 2L/min.

3.6 Temperature measurement mode: indirectly measure the temperature for the sample baseplate ( the thermocouple measures the temperature, and the temperature measurement range is normal temperature to 1000°C). It has the external infrared thermometer IRTP600DL, and the temperature range is 600-2000°C.

3.7 Reflected power is adjustable: the microwave reflected power is lower than 5%.

3.8 The system can work stably for a long time: continuous working time > 24h

3.9 System microwave leak: comply with national standard

3.10 Computer control system:

System working state monitoring (microwave power input, microwave power reflection, substrate temperature, chamber context vacuum, gas flow rate, and protection alarm system)

User program control (seting microwave input, system vacuum degree, gas flow rate, substrate plate temperature alarm, and working time.)

Microwave source and microwave power control: (set the microwave input, start the microwave, adjust microwave output, close microwave source)

The tuner control of microwave transmitting system: (display system reflection value and regulate the three piston.)

Sample bracket going up and down control (can adjust the sample bracket and show the position)

Vacuum system control (switch on and off the vacuum valve and display the state)

Gas flow rate control (can change 4 circuits MFC and display every flow rate)

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